Jump to content


Customers in the electronics sector require the highest possible level of cleanliness. Stains on the parts produced and contamination by e.g. silicon or phosphorus during the manufacturing and cleaning processes must be prevented. Especially with EUV lithography systems (EUV = photolithography process that uses electromagnetic radiation with a wavelength of 13.5 nm (91.82 eV), so-called extreme ultraviolet radiation (EUV). 

EUV lithography makes it possible, after exhausting previous exposure methods, to continue reducing the size of structures in the semiconductor industry in order to be able to produce smaller, more efficient and faster integrated circuits. 


Lubrication solutions for machine tools and lithography machines

Service Contact
+49 621-3701-0