I. Core Pain Points in Semiconductor Lubrication

Chip and OLED (organic light-emitting diode) manufacturing equipment operates for long periods in high-vacuum, high-temperature, 24/7 continuous running environments. Conventional lubricants have four major shortcomings, which are also the key difficulties for equipment manufacturers during selection:

• High risk of outgassing contamination: ordinary greases have relatively high vapor pressure and release large amounts of volatile substances under vacuum and high temperature conditions. When TML (Total Mass Loss) and CVCM (Collected Volatile Condensable Material) values exceed limits, condensates adhere to wafers, causing lithography defects and circuit failure, and significantly increasing scrap costs;
• High dynamic particle generation: lubricant particles shed during operation damage chamber cleanliness, affect sub-micron positioning accuracy, and cause wafer-handling robots to misplace wafers;
• Unbalanced temperature resistance and wear resistance: some lubricants dry out or are lost above 150°C, causing severe wear in bearings and guides under long-term high-speed friction and shortening replacement cycles for parts;
• Poor environmental compliance: most legacy lubricants exceed PFOA limits and fail to meet global chemical management requirements such as SEMI (Semiconductor Equipment and Materials International) and REACH (EU Registration, Evaluation, Authorisation and Restriction of Chemicals), making them difficult to pass factory incoming material audits.

To address these pain points, FUCHS NYE semiconductor lubricating grease/lubricating oil adopts two low-volatility chemical systems—PFPE (perfluoropolyether) and MAC (methylcyclopentane)—and is filled and packaged in ISO 7/8 cleanrooms. All products pass ASTM E595 vacuum outgassing testing, balancing the four core performances of low outgassing, low particle generation, high-temperature resistance, and environmental compliance.
 

II. Core Product Lines of FUCHS NYE Semiconductor Lubricating Grease/Lubricating Oil

FUCHS NYE semiconductor lubricating grease/lubricating oil is mainly divided into two categories: the NYETORR® ultra-high-vacuum series and the NYECLEAN® cleanroom series, suitable for different vacuum levels and temperature ranges.

1. NYETORR® PFPE Perfluorinated Series (ultra-high vacuum/high-temperature applications)

PFPE base oil has a temperature resistance up to 250°C and strong chemical inertness, making it suitable for various process corrosive gases and widely applicable to etching, deposition, and high-temperature vacuum robot applications.

• NYETORR® 6300S grease: a soft NLGI Grade 1 perfluorinated grease. Compared with NYETORR® 6300, it offers stronger penetration and flowability, a wide temperature range of -75 to 250°C, and a TML of only 0.012%. It is suitable for flat-panel displays and 12-inch wafer cross-arm bearings, reducing operating torque and component wear;
• NYETORR® 6301 lubricating oil: a representative FUCHS NYE semiconductor lubricating oil product with extremely low vapor pressure and TML/CVCM values approaching zero, mainly used for long-life lubrication of vacuum valves and micro sealing gaps;
• NYETORR® 5300XP grease: designed for heavy loads, with improved anti-wear additives, suitable for heavy-load ball screws and vacuum gearboxes, and not prone to oil separation during long-term vacuum operation.

2. NYETORR MAC Camphane Series (medium vacuum, wear-resistant applications)

The MAC platform offers a maximum temperature resistance of 150°C, with wear performance better than PFPE. Dynamic particle generation is controlled to ISO Class 3, making it suitable for linear guides and transfer sliders in high-volume equipment.

• The flagship NYETORR® 5200 grease can reduce guide rail friction torque by 33%, with evaporation rate approaching zero and TML as low as 0.068%. It is widely used in linear motion mechanisms of semiconductor processing equipment, balancing cost and cleanliness requirements.

3. NYECLEAN Cleanroom Series (non-vacuum back-end packaging)
Designed specifically for low-vacuum/atmospheric Class cleanrooms, with PFOA content below 25 ppb, fully compliant with SEMI environmental standards.

• NYECLEAN® 5057 grease is a mainstream alternative to FUCHS NYE semiconductor vacuum grease. It can replace multiple discontinued imported vacuum greases and offers an ultra-long bearing service life. It is suitable for packaging and inspection automation equipment; paired with NYETORR® 5361 lubricant for seal pre-lubrication to prevent FKM aging and swelling.

4. NYEVA Cester-based Lubricants Matched for Vacuum Pumps

NYEVAC 9720 and 9721, two FUCHS NYE semiconductor lubricants, are specially formulated for molecular pumps. Under medium-vacuum conditions, volatility is well controlled, low-temperature starting torque is small, and vacuum pump maintenance intervals are extended.