I. ASML Certification: Strict Pollution Control, Compatible with Lithography Equipment

ECOCOOL GLOBAL 1000 is a high-performance, low-outgassing, high-cleanliness metalworking cutting fluid specially developed by FUCHS for semiconductor, aerospace, medical, and other demanding fields, and it performs particularly well in semiconductor cleanliness and stability.
ECOCOOL GLOBAL 1000 has passed certification from ASML Grade 2, Applied Materials, and other leading semiconductor equipment manufacturers, fully meeting high-cleanliness machining standards. This product can strictly control 14 HIO (hydrogen-induced outgassing) elements, greatly reducing contamination risks and ensuring the safety of core equipment; it achieves low outgassing, high cleanliness, no residue, and easy cleaning, making it suitable for critical components such as vacuum chambers, valves, and precision carriers, while stably maintaining surface finish and machining accuracy. It is a cutting fluid well suited for high-end semiconductor processes.
This cutting fluid contains no boron, MEA (monoethanolamine), secondary amines, chlorinated paraffins, formaldehyde-releasing preservatives, or other restricted substances, and complies with REACH (the EU Registration, Evaluation, Authorisation and Restriction of Chemicals Regulation) and TSCA (the U.S. Toxic Substances Control Act), among other global chemical regulations. In addition, ECOCOOL GLOBAL 1000 has low odor and is non-irritating to the skin, effectively improving the workshop environment and reducing the risk of allergies for operators. Its excellent lubrication performance can effectively extend tool life and reduce unit cost.
In addition, the ECOCOOL IDM series jointly developed by FUCHS and DMG MORI can also meet ASML Grade 1 standards, satisfying the high-cleanliness requirements of advanced semiconductor processes and adapting to high-precision workpieces such as EUV core components.

II. DMG MORI Certification: Joint Development, Matched with the Clean ONE Solution

DMG MORI is a core equipment manufacturer for semiconductor precision machining. Its Clean ONE solution is built on the concept of “equipment, lubrication, and process as a unified cleanliness system.” DMG MORI and FUCHS have formed a deep strategic partnership, and in the semiconductor sector they prioritize the jointly developed ECOCOOL IDM series cutting fluids, creating a high-cleanliness golden combination of “Clean ONE machine tool + IDM series cutting fluid.”

• ECOCOOL SCE-IDM, SCS-IDM, and SCG-IDM are a full range of cutting fluid products developed specifically for high-cleanliness semiconductor requirements; they do not contain 14 HIO-sensitive elements and meet ASML Grade 1 requirements;
• ECOCOOL SCE-IDM and SCS-IDM are recommended for machining metals, plastics, and composite materials;
• ECOCOOL SCG-IDM is recommended for machining technical glass, ceramics, and plastics, and was developed specifically for DMG MORI ULTRASONIC equipment.