Meeting Modern Cleanroom Challenges
The semiconductor industry operates in some of the world’s most demanding environments, where a single contaminant—even one smaller than a grain of sand—can compromise an entire process. With fabrication processes numbering in the hundreds or even thousands, manufacturers depend on specialty lubrication solutions engineered specifically for ultra-clean and ultra-precise conditions. FUCHS delivers these solutions, helping to eliminate sources of molecular contamination and enabling consistent, defect-free semiconductor production.
Semiconductor manufacturers face relentless pressure to maximize yields, improve reliability, and minimize costly downtime. At the heart of these efforts is the need to prevent molecular contamination, particularly from lubricants used in critical semiconductor equipment. Outgassing, or the emission of small molecules from lubricant materials, risks depositing unwanted residues onto wafers, components, and process tools. Today, as semiconductor fabrication precision reaches the sub-10-nanometer level, this contamination becomes especially problematic—even microscopic pollutants can cause invisible defects, lost profits, and latent reliability issues.
Why Low-Outgassing Lubricants Matter
FUCHS’ NYETORR and NYECLEAN product lines offer low-outgassing lubricants developed through decades of expertise. Outgassing is akin to evaporation: as lubricants face vacuum environments and elevated temperatures, volatile molecules are released more quickly and settle on process-critical surfaces. To prevent such failures, FUCHS subjects every formulation to stringent Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) testing (ASTM E595), ensuring compliance with the most demanding semiconductor industry standards.
Key advantages include:
- Reduced Outgassing: Longer-lasting lubrication and less risk of airborne molecular contamination.
- Lower Particle Generation: Proprietary testing minimizes dynamic contaminants created when particles are forced or expelled from lubricated components into the operating environment.
- High-Temperature Stability: Reliable protection up to 250°C for in-vacuum and cleanroom applications.
- Extended Maintenance Intervals: Proven long life via tests like the Spiral Orbit Tribometer (SOT), reducing unplanned maintenance and downtime.
Application Insights: Precision and Reliability
FUCHS lubricants serve across diverse equipment:
Bearings & Gears
Protection against wear, corrosion, and friction; exceptional cleanliness for consistent movement and low particle generation.
Linear Guides
Precise motion and repeatability, with tested vacuum stability and chemical resistance.
Valves
Reliable performance under high pressure differentials, with formulations to ensure consistency and accuracy.
O-rings & Seals
Maintaining vacuum integrity, minimizing friction, and resisting aggressive process chemicals, as well as compatibility with advanced elastomeric polymers.
Tested, Trusted, and Globally Supported
Every FUCHS product for semiconductor manufacturing is backed by data-driven validation in state-of-the-art labs. Advanced testing mimics real-world conditions, such as vacuum and extreme temperatures, and allows selection of lubricants proven under the harshest scenarios. All semiconductor-grade products are ISO Class 7 and ISO Class 8 cleanroom packaged and distributed globally to ensure consistent quality wherever semiconductor manufacturing takes place.
Environmental and Regulatory Commitment
In today’s rapidly evolving regulatory landscape, FUCHS actively participates in leading industry organizations committed to developing lubricants that meet or exceed the latest environmental standards. Ongoing research promises next-generation non-PFAS lubrication, offering peace of mind for future regulatory compliance needs.
Proven Solutions for Cutting-Edge Manufacturing
With expertise spanning over 90 years, FUCHS is a trusted partner to leading OEMs and equipment builders worldwide. Our tailor-made lubrication solutions deliver unyielding reliability, allowing customers to benefit from experience, innovation, and individualized support from dedicated technical experts.
For real-world examples of how FUCHS lubricants have solved difficult engineering and design challenges. Explore customer case studies:
